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Proceedings Paper

Dual wavelength digital holography for improving the measurement accuracy
Author(s): Jianglei Di; Weijuan Qu; Bingjing Wu; Xin Chen; Jianlin Zhao; Anand Asundi
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Paper Abstract

In dual wavelength digital holography, a synthetic wavelength is obtained by using two lasers with different wavelengths to expand the measurement range of samples’ step heights from nanometers to micrometers. However, its measurement accuracy reduces along with the expansion of measuring range and significant noise is introduced at the same time. For cases where the sample’s height is smaller than the wavelength of illumination light, the measurement accuracy is very important. In this paper, a new approach of dual wavelength digital holography is presented. The synthetic wavelength is smaller than the wavelength of the two different lasers. Higher measurement accuracy can thus be achieved. The analysis and experimental results show the validity of this method.

Paper Details

Date Published: 22 June 2013
PDF: 6 pages
Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87690G (22 June 2013); doi: 10.1117/12.2020394
Show Author Affiliations
Jianglei Di, Northwestern Polytechnical Univ. (China)
Weijuan Qu, Ngee Ann Polytechnic (Singapore)
Bingjing Wu, Northwestern Polytechnical Univ. (China)
Xin Chen, Northwestern Polytechnical Univ. (China)
Jianlin Zhao, Northwestern Polytechnical Univ. (China)
Anand Asundi, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 8769:
International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013)
Chenggen Quan; Kemao Qian; Anand Asundi, Editor(s)

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