Proceedings Paper
Analysis of grating inscribed micro-cantilever for high resolution AFM probe| Format | Member Price | Non-Member Price |
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Paper Abstract
We present a mathematical modelling and analysis of reflection grating etched Si AFM cantilever deflections under
different loading conditions. A simple analysis of the effect of grating structures on cantilever deflection is carried out
with emphasis on optimizing the beam and gratings such that maximum amount of diffracted light remains within the
detector area.
Paper Details
Date Published: 22 June 2013
PDF: 5 pages
Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87690Z (22 June 2013); doi: 10.1117/12.2020330
Published in SPIE Proceedings Vol. 8769:
International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013)
Chenggen Quan; Kemao Qian; Anand Asundi, Editor(s)
PDF: 5 pages
Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87690Z (22 June 2013); doi: 10.1117/12.2020330
Show Author Affiliations
N. Balajee, Indian Institute of Science (India)
D. Roy Mahapatra, Indian Institute of Science (India)
D. Roy Mahapatra, Indian Institute of Science (India)
G. M. Hegde, Indian Institute of Science (India)
Published in SPIE Proceedings Vol. 8769:
International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013)
Chenggen Quan; Kemao Qian; Anand Asundi, Editor(s)
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