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Proceedings Paper

Laser-induced damage resistance of AlF3 films
Author(s): Jian Sun; Xu Li; Weili Zhang; Kui Yi; Jianda Shao
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Paper Abstract

AlF3 thin films were prepared by thermal evaporation at different substrate temperatures and deposition rates. The relationships between optical properties, mechanical properties and laser-induced damage threshold (LIDT) at 355nm of AlF3 films were discussed. Both absorption and stress increased with increasing substrate temperatures and deposition rates, which was a disadvantage to laser-induced damage resistance. Meanwhile, interfacial adhesion and hardness increased with substrate temperatures and deposition rates, which was an advantage to enhance the LIDT. The LIDT increased from room temperature to 200°C duo to increasing interfacial adhesion and hardness, and then decreased to 300°C duo to increasing absorption and stress. The LIDT decreased with deposition rates due to increasing absorption and stress.

Paper Details

Date Published: 9 July 2013
PDF: 5 pages
Proc. SPIE 8786, Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers, 878620 (9 July 2013); doi: 10.1117/12.2020278
Show Author Affiliations
Jian Sun, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Xu Li, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Weili Zhang, Shanghai Institute of Optics and Fine Mechanics (China)
Kui Yi, Shanghai Institute of Optics and Fine Mechanics (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 8786:
Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers
Jianda Shao; Takahisa Jitsuno; Wolfgang Rudolph, Editor(s)

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