
Proceedings Paper
Laser-induced damage resistance of AlF3 filmsFormat | Member Price | Non-Member Price |
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Paper Abstract
AlF3 thin films were prepared by thermal evaporation at different substrate temperatures and deposition rates. The
relationships between optical properties, mechanical properties and laser-induced damage threshold (LIDT) at 355nm of
AlF3 films were discussed. Both absorption and stress increased with increasing substrate temperatures and deposition
rates, which was a disadvantage to laser-induced damage resistance. Meanwhile, interfacial adhesion and hardness
increased with substrate temperatures and deposition rates, which was an advantage to enhance the LIDT. The LIDT
increased from room temperature to 200°C duo to increasing interfacial adhesion and hardness, and then decreased to
300°C duo to increasing absorption and stress. The LIDT decreased with deposition rates due to increasing absorption
and stress.
Paper Details
Date Published: 9 July 2013
PDF: 5 pages
Proc. SPIE 8786, Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers, 878620 (9 July 2013); doi: 10.1117/12.2020278
Published in SPIE Proceedings Vol. 8786:
Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers
Jianda Shao; Takahisa Jitsuno; Wolfgang Rudolph, Editor(s)
PDF: 5 pages
Proc. SPIE 8786, Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers, 878620 (9 July 2013); doi: 10.1117/12.2020278
Show Author Affiliations
Jian Sun, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Xu Li, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Weili Zhang, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Xu Li, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Weili Zhang, Shanghai Institute of Optics and Fine Mechanics (China)
Kui Yi, Shanghai Institute of Optics and Fine Mechanics (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)
Published in SPIE Proceedings Vol. 8786:
Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers
Jianda Shao; Takahisa Jitsuno; Wolfgang Rudolph, Editor(s)
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