
Proceedings Paper
Comparison of Michelson and Linnik interference microscopes with respect to measurement capabilities and adjustment effortsFormat | Member Price | Non-Member Price |
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Paper Abstract
Scanning white-light interferometry (SWLI) provides the capability of fast and high-precision three-dimensional
measurement of surface topography. Nevertheless, it is well-known that white-light interferometers more than imaging
microscopes suffer from chromatic aberration caused by the influence of dispersion. In this paper several interferometric
measurement systems are used for surface topography measurement. A Linnik interferometer and two Michelson
interferometers of different aberration correction are compared. A correction system designed using the ray tracing
software “Zemax” aims at an optimization the modulation transfer function (MTF). Although the MTF is optimized the
resulting spot diagrams are blurred due to chromatic aberration. Finally, a doubly corrected Michelson interferometer
will be presented. For this interferometer a nearly optimal MTF as well as minimized spot diagrams are achieved.
Paper Details
Date Published: 13 May 2013
PDF: 11 pages
Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 87882G (13 May 2013); doi: 10.1117/12.2020250
Published in SPIE Proceedings Vol. 8788:
Optical Measurement Systems for Industrial Inspection VIII
Peter H. Lehmann; Wolfgang Osten; Armando Albertazzi, Editor(s)
PDF: 11 pages
Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 87882G (13 May 2013); doi: 10.1117/12.2020250
Show Author Affiliations
Peter Lehmann, Univ. Kassel (Germany)
Published in SPIE Proceedings Vol. 8788:
Optical Measurement Systems for Industrial Inspection VIII
Peter H. Lehmann; Wolfgang Osten; Armando Albertazzi, Editor(s)
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