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Proceedings Paper

Making, testing, applying: some progress in the field of micro-optics at ITO
Author(s): W. Osten; G. Baer; M. Häfner; W. Lyda; C. Pruss; R. Reichle; F. Schaal
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Paper Abstract

Microoptical components play an increasing role in different technology fields such as medical engineering, materials and information processing, imaging and metrology. But their realization needs the combination of modern design concepts with sophisticated processing technologies, new materials and design tools. Furthermore, the introduction of ambitious processing technologies must be accompanied by effective metrology and inspection tools. Therefore, this paper reports about the technologies for making microoptics at ITO. Because sophisticated measurement tools are an indispensable part of the fabrication process, the paper describes our multi-scale inspection approach for the testing of microstructures on wafer-scale level. Finally, some representative applications of microoptical components for advanced measurement and imaging are explained.

Paper Details

Date Published: 22 June 2013
PDF: 11 pages
Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 876905 (22 June 2013); doi: 10.1117/12.2020249
Show Author Affiliations
W. Osten, Univ. Stuttgart (Germany)
G. Baer, Univ. Stuttgart (Germany)
M. Häfner, Univ. Stuttgart (Germany)
W. Lyda, Univ. Stuttgart (Germany)
C. Pruss, Univ. Stuttgart (Germany)
R. Reichle, Univ. Stuttgart (Germany)
F. Schaal, Univ. Stuttgart (Germany)

Published in SPIE Proceedings Vol. 8769:
International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013)
Chenggen Quan; Kemao Qian; Anand Asundi, Editor(s)

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