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Proceedings Paper

High speed measurement of specular surfaces based on carrier fringe patterns in a line scan Michelson interferometer setup
Author(s): Holger Knell; Peter Lehmann
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Paper Abstract

For sub-micrometer measurements of large objects a setup is presented utilizing a line-scan camera for data acquisition with a Michelson interferometer. To extract height information a carrier fringe approach is used in combination with a linear axis moving the specimen. This technique provides the capability of quick measurements for large areas. For the estimation of the maximum acceptable scan speed the deviation of the linear axis from ideal movement is determined. Also a suitable choice for a light source is presented. Measurement capabilities are approved by reference measurements on a sinusoidal standard.

Paper Details

Date Published: 13 May 2013
PDF: 12 pages
Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 87880R (13 May 2013); doi: 10.1117/12.2020121
Show Author Affiliations
Holger Knell, Univ. Kassel (Germany)
Peter Lehmann, Univ. Kassel (Germany)

Published in SPIE Proceedings Vol. 8788:
Optical Measurement Systems for Industrial Inspection VIII
Peter H. Lehmann; Wolfgang Osten; Armando Albertazzi, Editor(s)

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