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Proceedings Paper

Absolute testing of flats with all terms by using even and odd functions
Author(s): Xin Jia; Fuchao Xu; Tingwen Xing; Zhixiang Liu
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Paper Abstract

In Cartesian coordinate system, a flat can be expressed as the sum of even-odd, odd-even, even-even and oddodd functions. In the traditional three-flat even and odd function method, odd-odd function is difficult to obtain. In our paper the odd-odd function can be solved by use the Dove prism which can rotate the optical axis. The odd-odd function can calculate exactly. The even-odd, odd-even, even-even can be solved by rotating the flat 180°like the traditional method. Only five configurations are used to test the flats. The theoretical derivation and analysis are presented.

Paper Details

Date Published: 13 May 2013
PDF: 7 pages
Proc. SPIE 8789, Modeling Aspects in Optical Metrology IV, 878911 (13 May 2013); doi: 10.1117/12.2019722
Show Author Affiliations
Xin Jia, Institute of Optics and Electronics (China)
Fuchao Xu, Institute of Optics and Electronics (China)
Tingwen Xing, Institute of Optics and Electronics (China)
Zhixiang Liu, Institute of Optics and Electronics (China)

Published in SPIE Proceedings Vol. 8789:
Modeling Aspects in Optical Metrology IV
Bernd Bodermann; Karsten Frenner; Richard M. Silver, Editor(s)

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