Paper Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 8563, including the Title Page, Copyright information, Table of Contents, Introduction, and Conference Committee listing.
Paper Details
Date Published: 7 January 2013
PDF: 14 pages
Proc. SPIE 8563, Optical Metrology and Inspection for Industrial Applications II, 856301 (7 January 2013); doi: 10.1117/12.2017914
Published in SPIE Proceedings Vol. 8563:
Optical Metrology and Inspection for Industrial Applications II
Kevin G. Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)
PDF: 14 pages
Proc. SPIE 8563, Optical Metrology and Inspection for Industrial Applications II, 856301 (7 January 2013); doi: 10.1117/12.2017914
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Published in SPIE Proceedings Vol. 8563:
Optical Metrology and Inspection for Industrial Applications II
Kevin G. Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)
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