This PDF file contains the front matter associated with SPIE Proceedings Volume 8563, including the Title Page, Copyright information, Table of Contents, Introduction, and Conference Committee listing.

Date Published: 7 January 2013
PDF: 14 pages
Proc. SPIE 8563, Optical Metrology and Inspection for Industrial Applications II, 856301 (7 January 2013); doi: 10.1117/12.2017914

Published in SPIE Proceedings Vol. 8563:
Optical Metrology and Inspection for Industrial Applications II
Kevin G. Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)