Silicon nitride ring resonators with diameter of 250 and 500 μm are fabricated and their spectral characteristics investigated with the ultimate goal of optical frequency comb generation for astronomical spectrograph calibration. A continuously tunable laser was used to evaluate the spectral characteristics (propagation losses and transmission properties) of PECVD silicon nitride waveguides and ring-resonators. Losses were measured to be smaller than 0.75 dB/cm over the range between 1500 nm and 1620 nm. The transmission properties of the fabricated ring resonators were assessed for the TE and TM modes, showing promise for the ultimate goal of astronomical optical frequency comb generation.

Date Published: 7 May 2013
PDF: 6 pages
Proc. SPIE 8781, Integrated Optics: Physics and Simulations, 87811A (7 May 2013); doi: 10.1117/12.2017300

Published in SPIE Proceedings Vol. 8781:
Integrated Optics: Physics and Simulations
Pavel Cheben; Jiří Čtyroký; Iñigo Molina-Fernandez, Editor(s)