Application of virtual instruments to a process of measurements of geometrical characteristics of investigated objects is considered. Methods of construction of virtual instruments on a base of imitators and simulators are discussed. It is demonstrated, that a virtual scanning electron microscope (SEM) can be constructed only on the base of simulator. Examples of work of the virtual SEM in a low-voltage mode and in modes of registration of back scattered electrons (BSE) and slow secondary of electrons (SSE) are given.

Date Published: 8 January 2013
PDF: 12 pages
Proc. SPIE 8700, International Conference Micro- and Nano-Electronics 2012, 87000X (8 January 2013); doi: 10.1117/12.2016977

Published in SPIE Proceedings Vol. 8700:
International Conference Micro- and Nano-Electronics 2012
Alexander A. Orlikovsky, Editor(s)