A high precision contact probe for a micro/nano-CMM was developed to detect the 3D motion of the stylus tip. This contact probe is composed of a stylus with a ball tip, a suspension plate and three displacement sensors. The stylus was connected to the suspension plate, which is suspended to the probe housing by three beryllium-copper leaf springs. A 3D translation of a ball tip causing by probing force would be transferred to three Z-displacements on the suspension plate. Displacement sensors, based on the classic model of Michelson interferometer, can measure nanoscale displacement on the plate. Calibrations with a nano measuring and positioning machine (NMM) proved the typical standard deviation was less than 20 nm for both the trigger and scanning modes.

Date Published: 31 January 2013
PDF: 8 pages
Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87592E (31 January 2013); doi: 10.1117/12.2016788

Published in SPIE Proceedings Vol. 8759:
Eighth International Symposium on Precision Engineering Measurement and Instrumentation
Jie Lin, Editor(s)