The aim of this contribution is to report and discuss a preliminary study and rough optimization of a novel concept of MEMS device for vibration energy harvesting, based on a multi-modal dynamic behavior. The circular-shaped device features Four-Leaf Clover-like (FLC) double spring-mass cascaded systems, kept constrained to the surrounding frame by means of four straight beams. The combination of flexural bending behavior of the slender beams plus deformable parts of the petals enable to populate the desired vibration frequency range with a number of resonant modes, and improve the energy conversion capability of the micro-transducer. The harvester device, conceived for piezoelectric mechanical into electric energy conversion, is intended to sense environmental vibrations and, thereby, its geometry is optimized to have a large concentration of resonant modes in a frequency range below 5-10 kHz. The results of FEM (Finite Element Method) based analysis performed in ANSYS^TM Workbench are reported, both concerning modal and harmonic response, providing important indications related to the device geometry optimization. The analysis reported in this work is limited to the sole mechanical modeling of the proposed MEMS harvester device concept. Future developments of the study will encompass the inclusion of piezoelectric conversion in the FEM simulations, in order to have indications of the actual power levels achievable with the proposed harvester concept. Furthermore, the results of the FEM studies here discussed, will be validated against experimental data, as soon as the MEMS resonator specimens, currently under fabrication, are ready for testing.

Date Published: 17 May 2013
PDF: 12 pages
Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87630X (17 May 2013); doi: 10.1117/12.2016766

Published in SPIE Proceedings Vol. 8763:
Smart Sensors, Actuators, and MEMS VI
Ulrich Schmid; José Luis Sánchez de Rojas Aldavero; Monika Leester-Schaedel, Editor(s)