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Proceedings Paper

New silicon technologies enable high-performance arrays of single photon avalanche diodes
Author(s): Angelo Gulinatti; Ivan Rech; Piera Maccagnani; Sergio Cova; Massimo Ghioni
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Paper Abstract

In order to fulfill the requirements of many applications, we recently developed a new technology aimed at combining the advantages of traditional thin and thick silicon Single Photon Avalanche Diodes (SPAD). In particular we demonstrated single-pixel detectors with a remarkable improvement in the Photon Detection Efficiency at the longer wavelengths (e.g. 40% at 800nm) while maintaining a timing jitter better than 100ps. In this paper we will analyze the factors the currently prevent the fabrication of arrays of SPADs by adopting such a Red-Enhanced (RE) technology and we will propose further modifications to the device structure that will enable the fabrication of high performance RE-SPAD arrays for photon timing applications.

Paper Details

Date Published: 29 May 2013
PDF: 10 pages
Proc. SPIE 8727, Advanced Photon Counting Techniques VII, 87270M (29 May 2013); doi: 10.1117/12.2016384
Show Author Affiliations
Angelo Gulinatti, Politecnico di Milano (Italy)
Ivan Rech, Politecnico di Milano (Italy)
Piera Maccagnani, Istituto per la Microelettronica e Microsistemi, CNR (Italy)
Sergio Cova, Politecnico di Milano (Italy)
Micro Photon Devices S.r.l. (Italy)
Massimo Ghioni, Politecnico di Milano (Italy)
Micro Photon Devices S.r.l. (Italy)

Published in SPIE Proceedings Vol. 8727:
Advanced Photon Counting Techniques VII
Mark A. Itzler; Joe C. Campbell, Editor(s)

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