This paper presents a systematic study of the 1/f noise coefficient as a function of pixel geometry for microbolometer structures. Structures with various VO_x widths, electrode gaps, electrode widths and via hole sizes were fabricated and characterized. The experimental results show that the 1/f noise coefficient is adversely affected by current non uniformity, in agreement with model predictions. Design parameters that significantly impact current non uniformity are identified and approaches to minimize their importance are proposed.

Date Published: 11 June 2013
PDF: 9 pages
Proc. SPIE 8704, Infrared Technology and Applications XXXIX, 87041Q (11 June 2013); doi: 10.1117/12.2016250

Published in SPIE Proceedings Vol. 8704:
Infrared Technology and Applications XXXIX
Bjørn F. Andresen; Gabor F. Fulop; Charles M. Hanson; Paul R. Norton; Patrick Robert, Editor(s)