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Proceedings Paper

High-actuator-count MEMS deformable mirrors
Author(s): Michael A. Helmbrecht; Min He; Carl J. Kempf
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Paper Abstract

Adaptive optics (AO) technology has enabled dramatic improvement in imaging performance for fields spanning astronomy, defense, microscopy, and retinal imaging. A critical component within the AO systems is the deformable mirror (DM) that implements the actual wavefront correction. This paper introduces the Iris AO segmented MEMS DM technology with an overview of the fabrication process and a description of the DM operation. The paper demonstrates correction capabilities of 111 and 489 actuator DMs and describes recent effort for scaling to 1000-actuator class DMs. Finally, the paper presents laser testing results of dielectric coated DMs and describes the development path for MEMS DMs capable of 2.8 kW/cm2 average laser power.

Paper Details

Date Published: 29 May 2013
PDF: 7 pages
Proc. SPIE 8725, Micro- and Nanotechnology Sensors, Systems, and Applications V, 87250V (29 May 2013); doi: 10.1117/12.2016198
Show Author Affiliations
Michael A. Helmbrecht, Iris AO, Inc. (United States)
Min He, Iris AO, Inc. (United States)
Carl J. Kempf, Iris AO, Inc. (United States)

Published in SPIE Proceedings Vol. 8725:
Micro- and Nanotechnology Sensors, Systems, and Applications V
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)

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