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Proceedings Paper

Helios: a compact superconducting x-ray source for production lithography
Author(s): David E. Andrews; M. N. Wilson; Alistair I.C. Smith; Vince C. Kempson; A. L. Purvis; R. J. Anderson; A. S. Bhutta; Anthony R. Jorden
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Paper Abstract

Synchrotron radiation from electron storage rings has the unique capacity to provide the several kilowatts of continuous X-ray power necessary for production scale X-ray lithography-. While national laboratories have developed electron storage ring technology to an exact science and can provide X-ray beams of an intensity and quality appropriate for lithography, they have not built machines optimized for lithography and designed to be replicated in semiconductor fabrication facilities. Since 1983, Oxford Instruments have been working on the development of a practical synchrotron X-ray source, called Helios. Final system tests will commence this spring on the initial Helios compact synchrotron.

Paper Details

Date Published: 1 May 1990
PDF: 7 pages
Proc. SPIE 1263, Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX, (1 May 1990); doi: 10.1117/12.20152
Show Author Affiliations
David E. Andrews, Oxford Instruments Ltd. (United States)
M. N. Wilson, Oxford Instruments Ltd. (United Kingdom)
Alistair I.C. Smith, Oxford Instruments Ltd. (United Kingdom)
Vince C. Kempson, Oxford Instruments Ltd. (United Kingdom)
A. L. Purvis, Oxford Instruments Ltd. (United Kingdom)
R. J. Anderson, Oxford Instruments Ltd. (United Kingdom)
A. S. Bhutta, Oxford Instruments Ltd. (United Kingdom)
Anthony R. Jorden, Oxford Instruments Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 1263:
Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX
Douglas J. Resnick, Editor(s)

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