
Proceedings Paper
Electron storage rings as x-ray lithography sources: an overviewFormat | Member Price | Non-Member Price |
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Paper Abstract
Synchrotron radiation from dipole magnets in electron storage rings has emerged as a useful source of x-rays for
lithography. To meet the need for these sources numerous groups around the world have embarked on projects to design
and construct storage rings for x-ray lithography. Both conventional electromagnets as well as superconducting (SC)
dipoles have been incorporated into the various designs. An overview of the worldwide effort to produce commercial xray
sources will be presented. To better illustrate the elements involved in these sources a closer examination of the
Superconducting X-ray Lithography Source Project (SXLS) at BNL will be presented.
Paper Details
Date Published: 1 May 1990
PDF: 8 pages
Proc. SPIE 1263, Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX, (1 May 1990); doi: 10.1117/12.20151
Published in SPIE Proceedings Vol. 1263:
Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX
Douglas J. Resnick, Editor(s)
PDF: 8 pages
Proc. SPIE 1263, Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX, (1 May 1990); doi: 10.1117/12.20151
Show Author Affiliations
James B. Murphy, Brookhaven National Lab. (United States)
Published in SPIE Proceedings Vol. 1263:
Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX
Douglas J. Resnick, Editor(s)
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