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Proceedings Paper

Thermal conductivity tensor of semiconductor layers using two-wire 3-omega method
Author(s): Chuanle Zhou; G. Koblmüller; M. Bichler; G. Abstreiter; M. Grayson
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Paper Abstract

We used the two-wire 3ω method to measure the in-plane and out-of-plane thermal conductivity of thin films and analyzed the error for all fitting parameters. We find the heater half-width, the insulating layer thickness and the out-of-plane thermal conductivity of the insulating layer the most sensitive parameters in an accurate fitting. The data of a 2.5 μm GaAs thin film suggests that the phonon mean free path in the film is limited to the film thickness, far shorter than that in the bulk material at low temperatures.

Paper Details

Date Published: 4 February 2013
PDF: 8 pages
Proc. SPIE 8631, Quantum Sensing and Nanophotonic Devices X, 863129 (4 February 2013); doi: 10.1117/12.2014610
Show Author Affiliations
Chuanle Zhou, Northwestern Univ. (United States)
G. Koblmüller, Technische Univ. München (Germany)
M. Bichler, Technische Univ. München (Germany)
G. Abstreiter, Technische Univ. München (Germany)
M. Grayson, Northwestern Univ. (United States)

Published in SPIE Proceedings Vol. 8631:
Quantum Sensing and Nanophotonic Devices X
Manijeh Razeghi, Editor(s)

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