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Proceedings Paper

Block co-polymer multiple patterning directed self-assembly on PS-OH brush layer and AFM based nanolithography
Author(s): Lorea Oria; Alaitz Ruiz de Luzuriaga; Juan Antonio Alduncín; Francesc Pérez-Murano
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Paper Abstract

We present a method to direct the self-assembly of PS/PMMA block co-polymer by surface chemical modification using atomic force microscopy (AFM) based nanolithography. In our approach, a PS-OH brush layer is chemically modified by the AFM tip, creating a nanometer scale guiding pattern that induces the alignment of the block co-polymer. Compared to alternative procedures that involves electron beam or deep UV lithography, AFM nanolithography is a simpler process since it does not require the use of an additional resist processing step. In addition, AFM nanolithography presents the potential to define the guiding patterns with better control and resolution.

Paper Details

Date Published: 26 March 2013
PDF: 8 pages
Proc. SPIE 8680, Alternative Lithographic Technologies V, 868022 (26 March 2013); doi: 10.1117/12.2014515
Show Author Affiliations
Lorea Oria, Microelectronic Institute of Barcelona (Spain)
Alaitz Ruiz de Luzuriaga, CIDETEC (Spain)
Juan Antonio Alduncín, CIDETEC (Spain)
Francesc Pérez-Murano, Microelectronic Institute of Barcelona (Spain)

Published in SPIE Proceedings Vol. 8680:
Alternative Lithographic Technologies V
William M. Tong, Editor(s)

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