In order to improve accuracy of critical contacting position in measurement of micro-scale using aiming and triggering method, delay error of triggering signal, sampling delay error of sensor and length measuring device(double frequency laser interferometer) impact on accuracy are analyzed, compensation methods of solving nodal equation through establishing piecewise fitting function based on least square polynomial fitting and compute threshold triggering points through computing delay time are put forward. With this method, the measured diameter of micro-hole with nominal diameter Φ 0.3mm and depth 1.0mm is compensated. Results indicate that diameter of micro-hole after compensation increases 0.12 μm, closer to nominal value, and experimental standard deviation reduces by 0.069 μm. Therefore the measuring repeatability is improved, which demonstrates that the method is correct and effective.

Date Published: 31 January 2013
PDF: 11 pages
Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87592L (31 January 2013); doi: 10.1117/12.2014509

Published in SPIE Proceedings Vol. 8759:
Eighth International Symposium on Precision Engineering Measurement and Instrumentation
Jie Lin, Editor(s)