Stretching of laser pulses allows to improve eximer laser output characteristics and to prolong a laser lifetime. Two methods of laser pumping are proposed in this paper for stretching of laser pulses. Using a special electric circuit in a pumping generator scheme allowed to double a pulse duration for a small ArF-laser. For the first time a pumping mode with periodically damping voltage across a discharge gap was successfully realized for increasing of KrF-laser pulse duration.

Date Published: 15 March 2013
PDF: 8 pages
Proc. SPIE 8770, 17th International School on Quantum Electronics: Laser Physics and Applications, 87700C (15 March 2013); doi: 10.1117/12.2014508

Published in SPIE Proceedings Vol. 8770:
17th International School on Quantum Electronics: Laser Physics and Applications
Tanja N. Dreischuh; Albena T. Daskalova, Editor(s)