
Proceedings Paper
Two methods of pumping for eximer laser pulse-stretchingFormat | Member Price | Non-Member Price |
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Paper Abstract
Stretching of laser pulses allows to improve eximer laser output characteristics and to prolong a laser lifetime. Two methods of laser pumping are proposed in this paper for stretching of laser pulses. Using a special electric circuit in a pumping generator scheme allowed to double a pulse duration for a small ArF-laser. For the first time a pumping mode with periodically damping voltage across a discharge gap was successfully realized for increasing of KrF-laser pulse duration.
Paper Details
Date Published: 15 March 2013
PDF: 8 pages
Proc. SPIE 8770, 17th International School on Quantum Electronics: Laser Physics and Applications, 87700C (15 March 2013); doi: 10.1117/12.2014508
Published in SPIE Proceedings Vol. 8770:
17th International School on Quantum Electronics: Laser Physics and Applications
Tanja N. Dreischuh; Albena T. Daskalova, Editor(s)
PDF: 8 pages
Proc. SPIE 8770, 17th International School on Quantum Electronics: Laser Physics and Applications, 87700C (15 March 2013); doi: 10.1117/12.2014508
Show Author Affiliations
Ekaterina A. Shershunova, Institute for Electrophysics and Electric Power (Russian Federation)
Maxim V. Malashin, Institute for Electrophysics and Electric Power (Russian Federation)
Sergey I. Moshkunov, Institute for Electrophysics and Electric Power (Russian Federation)
Maxim V. Malashin, Institute for Electrophysics and Electric Power (Russian Federation)
Sergey I. Moshkunov, Institute for Electrophysics and Electric Power (Russian Federation)
Vladimir A. Yamschikov, Institute for Electrophysics and Electric Power (Russian Federation)
Vladislav Yu. Khomich, Institute for Electrophysics and Electric Power (Russian Federation)
Vladislav Yu. Khomich, Institute for Electrophysics and Electric Power (Russian Federation)
Published in SPIE Proceedings Vol. 8770:
17th International School on Quantum Electronics: Laser Physics and Applications
Tanja N. Dreischuh; Albena T. Daskalova, Editor(s)
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