
Proceedings Paper
Analysis of the elastic mechanism for contact scanning probeFormat | Member Price | Non-Member Price |
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Paper Abstract
High precision contact scanning probes for measuring miniature components on micro- and nano-coordinate measuring
machines require elastic mechanisms. In order to realize the probe’s mechanical behavior and stiffness when designing
an elastic mechanism for a contact scanning probe, the elastic mechanism is analyzed by the theory of elasticity and
finite element analysis in this paper. The contact scanning probe is composed of a fiber stylus with a ball tip, a
mechanism of floating plate suspended by four leaf springs, and two optical sensors. The leaf springs experience elastic
deformation when a contact force is applied. Uniform stiffness model is analyzed. Simulation and experimental results
verify the correctness of the analysis.
Paper Details
Date Published: 31 January 2013
PDF: 9 pages
Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87590M (31 January 2013); doi: 10.1117/12.2014421
Published in SPIE Proceedings Vol. 8759:
Eighth International Symposium on Precision Engineering Measurement and Instrumentation
Jie Lin, Editor(s)
PDF: 9 pages
Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87590M (31 January 2013); doi: 10.1117/12.2014421
Show Author Affiliations
Published in SPIE Proceedings Vol. 8759:
Eighth International Symposium on Precision Engineering Measurement and Instrumentation
Jie Lin, Editor(s)
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