Share Email Print

Proceedings Paper

Direct laser manufacturing of 1D and 2D micro- and submicro-scale periodic structures
Author(s): J. Marczak; A. Rycyk; A. Sarzyński; M. Strzelec; J. Kusiński; R. Major
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

The paper presents results of direct micromachining and direct interference lithography using high power laser. The technology allows one step (direct) manufacturing of surface structures in micro- and submicro-scale with well defined long-range arrangement. Construction of the two-channel laser system creates arms of the Mach-Zehnder interferometer, which allows fast and easy change of the interference pattern parameters as well as control of energy density in the interfering laser beams.

Paper Details

Date Published: 22 January 2013
PDF: 12 pages
Proc. SPIE 8703, Laser Technology 2012: Applications of Lasers, 87030F (22 January 2013); doi: 10.1117/12.2013280
Show Author Affiliations
J. Marczak, Military Univ. of Technology (Poland)
A. Rycyk, Military Univ. of Technology (Poland)
A. Sarzyński, Military Univ. of Technology (Poland)
M. Strzelec, Military Univ. of Technology (Poland)
J. Kusiński, AGH Univ. of Science and Technology (Poland)
R. Major, Institute of Metallurgy and Materials Science (Poland)

Published in SPIE Proceedings Vol. 8703:
Laser Technology 2012: Applications of Lasers
Wiesław L Woliński; Zdzisław Jankiewicz; Ryszard S. Romaniuk, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?