We present an overview of the theoretical and experimental research activities at the U.S. Naval Research Laboratory in the area of millimeter-wave and sub-millimeter-wave vacuum electronics. Amplifier and related circuit development ranging in frequency from 30 GHz to 1.35 THz at power levels from multi-kilowatts to watts will be described along with electron gun topologies that include single-, multiple-, and sheet electron beams. We also describe new ultra-violet photolithographic techniques that enable the fabrication of thick (up to 1000 μm), high vertical aspect ratio, solid copper structures with integrated beam tunnels with length-to-diameter aspects ratios of <500.

Date Published: 27 March 2013
PDF: 8 pages
Proc. SPIE 8624, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications VI, 86240H (27 March 2013); doi: 10.1117/12.2012060

Published in SPIE Proceedings Vol. 8624:
Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications VI
Laurence P. Sadwick; Créidhe M. O'Sullivan, Editor(s)