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Proceedings Paper

Novel fluorinated compounds for releasing material in nanoimprint lithography
Author(s): Tsuneo Yamashita; Hisashi Mitsuhashi; Masamichi Morita
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Paper Abstract

In recent years, utilization and reduction of pattern size are following nanoimprint lithography (NIL) quickly. In nanoimprinting, since it is contact printing, a higher separation force might cause damages to the master and imprinting tool, degradation in pattern quality as well. There is a mold-release characteristic of a master and resin as one of the biggest subjects in utilization. Although Optool DSXTM (DAIKIN Ind. Ltd.) is an de facto standard as mold releasing reagent now, there is a problem in durability at UV-NIL. Then, we focused on the material which raises the mold-release characteristic of resist. The new fluorinated copolymers based on α-chloroacrylate and the low molecular weight perfluorocompounds, added to resist was developed. In this paper, we will report these synthesis method, specific properties such as static contact angle, releasing force and further fluorinated compounds were segregated resin surface.

Paper Details

Date Published: 26 March 2013
PDF: 8 pages
Proc. SPIE 8680, Alternative Lithographic Technologies V, 86800D (26 March 2013); doi: 10.1117/12.2011966
Show Author Affiliations
Tsuneo Yamashita, Daikin Industries, Ltd. (Japan)
Hisashi Mitsuhashi, Daikin Industries, Ltd. (Japan)
Masamichi Morita, Daikin Industries, Ltd. (Japan)

Published in SPIE Proceedings Vol. 8680:
Alternative Lithographic Technologies V
William M. Tong, Editor(s)

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