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Proceedings Paper

EUV actinic blank inspection: from prototype to production
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Paper Abstract

The availability of actinic blank inspection is one of the key milestones for EUV lithography on the way to high volume manufacturing. Placed at the very beginning of the mask manufacturing flow, blank inspection delivers the most critical data set for the judgment of the initial blank quality and final mask performance. From all actinic metrology tools proposed and discussed over the last years, actinic blank inspection (ABI) tool is the first one to reach the pre-production status. In this paper we give an overview of EIDEC-Lasertec ABI program, provide a description of the system and share the most recent performance test results of the tool for 16 nm technology node.

Paper Details

Date Published: 1 April 2013
PDF: 6 pages
Proc. SPIE 8679, Extreme Ultraviolet (EUV) Lithography IV, 86790I (1 April 2013); doi: 10.1117/12.2011776
Show Author Affiliations
Anna Tchikoulaeva, Lasertec U.S.A., Inc. Zweigniederlassung Deutschland (Germany)
Hiroki Miyai, Lasertec Corp. (Japan)
Tomohiro Suzuki, Lasertec Corp. (Japan)
Kiwamu Takehisa, Lasertec Corp. (Japan)
Haruhiko Kusunose, Lasertec Corp. (Japan)
Takeshi Yamane, EUVL Infrastructure Development Ctr., Inc. (Japan)
Tsuneo Terasawa, EUVL Infrastructure Development Ctr., Inc. (Japan)
Hidehiro Watanabe, EUVL Infrastructure Development Ctr., Inc. (Japan)
Soichi Inoue, EUVL Infrastructure Development Ctr., Inc. (Japan)
Ichiro Mori, EUVL Infrastructure Development Ctr., Inc. (Japan)

Published in SPIE Proceedings Vol. 8679:
Extreme Ultraviolet (EUV) Lithography IV
Patrick P. Naulleau, Editor(s)

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