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Proceedings Paper

Block-copolymer healing of simple defects in a chemoepitaxial template
Author(s): Paul N. Patrone; Gregg M. Gallatin
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Paper Abstract

Using the Leibler-Ohta-Kawasaki (LOK) phase-field model of block copolymers (BCPs), we characterize how a chemoepitaxial template with parallel lines of arbitrary width affects the BCP microdomain shape. We apply boundary conditions that account for the interactions of the polymers with the templated substrate and a neutral top-coat. We derive formulas for the monomer density and the microdomain interface profile of periodic, lamellar BCP melts whose template lines are wider or narrower than the bulk microdomain width. For such systems, our analysis (i) shows that mass conservation causes the microdomain interfaces to oscillate about their bulk positions and (ii) determines the length scale λ over which these oscillations decay away from the substrate.

Paper Details

Date Published: 26 March 2013
PDF: 9 pages
Proc. SPIE 8680, Alternative Lithographic Technologies V, 86801R (26 March 2013); doi: 10.1117/12.2011656
Show Author Affiliations
Paul N. Patrone, National Institute of Standards and Technology (United States)
Univ. of Maryland, College Park (United States)
Gregg M. Gallatin, National Institute of Standards and Technology (United States)
Applied Math Solutions LLC (United States)

Published in SPIE Proceedings Vol. 8680:
Alternative Lithographic Technologies V
William M. Tong, Editor(s)

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