Proceedings Paper
Imaging with plasma based extreme ultraviolet sources| Format | Member Price | Non-Member Price |
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Paper Abstract
The chapter addresses microscopy with plasma based laboratory extreme ultraviolet (EUV) and soft-x-ray sources. The
focus is set on the determination of necessary source parameters like radiance and size from fundamental considerations
of the achievable sample resolution, image contrast, detector quantum efficiency and required throughput. The
estimations account for the influence of photon noise on signal detection and conservation of light etendue and radiant
flux. Two cases are considered more detailed – resolution optimized bright field microscopy and sensitivity optimized
dark field microscopy. Inspection of EUV masks and mask blanks required for EUV lithography at 13.5 nm wavelength
is chosen as an illustration for both cases.
Paper Details
Date Published: 11 December 2012
PDF: 12 pages
Proc. SPIE 8678, Short-Wavelength Imaging and Spectroscopy Sources, 86780F (11 December 2012); doi: 10.1117/12.2011139
Published in SPIE Proceedings Vol. 8678:
Short-Wavelength Imaging and Spectroscopy Sources
Davide Bleiner, Editor(s)
PDF: 12 pages
Proc. SPIE 8678, Short-Wavelength Imaging and Spectroscopy Sources, 86780F (11 December 2012); doi: 10.1117/12.2011139
Show Author Affiliations
Larissa Juschkin, RWTH Aachen (Germany)
JARA - Fundamentals of Future Information Technology (Germany)
JARA - Fundamentals of Future Information Technology (Germany)
Published in SPIE Proceedings Vol. 8678:
Short-Wavelength Imaging and Spectroscopy Sources
Davide Bleiner, Editor(s)
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