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Proceedings Paper

Double patterning: solutions in parasitic extraction
Author(s): Dusan Petranovic; James Falbo; Nur Kurt-Karsilayan
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Paper Abstract

In this paper, we analyze advantages and disadvantages of various extraction-based techniques applied to colorless and colored double patterning layouts. Two techniques are presented: (1) an effective dielectric constant-based technique, which modifies the dielectric constants to obtain an equivalent capacitance change as would result from mask misalignment, and (2) an offset-based, less conservative technique, that proposes the use of custom corners. Experimental results illustrate the impact of double patterning on the parasitics, and allow us to compare these techniques.

Paper Details

Date Published: 29 March 2013
PDF: 6 pages
Proc. SPIE 8684, Design for Manufacturability through Design-Process Integration VII, 86840M (29 March 2013); doi: 10.1117/12.2010838
Show Author Affiliations
Dusan Petranovic, Mentor Graphics Corp. (United States)
James Falbo, Mentor Graphics Corp. (United States)
Nur Kurt-Karsilayan, Mentor Graphics Corp. (United States)

Published in SPIE Proceedings Vol. 8684:
Design for Manufacturability through Design-Process Integration VII
Mark E. Mason; John L. Sturtevant, Editor(s)

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