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Proceedings Paper

Light scattering by organic crosslinking material using nanomorphology of polymer blends
Author(s): Satoshi Takei; Naoya Kubo; Takumi Ichikawa; Kazuki Maekawa; Yoshiyuki Yokoyama
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Paper Abstract

This study reports a progress to create the regularly-structured circle using nanomorphology by the nanoparticle free polymer blends. The developed light scattering organic crosslinking material containing no particles, indicated excellent light scattering rates of more than 6.0 % at 300-400 nm wavelength, a sufficient thermal stability up to 170 °C, and better O2 gas barrier properties than that of polyethylene. This desirable concept using nanomorphology of polymer blends in light scattering film is expected to be effective in promoting the future production of next generation electronic devices.

Paper Details

Date Published: 29 March 2013
PDF: 9 pages
Proc. SPIE 8682, Advances in Resist Materials and Processing Technology XXX, 86821M (29 March 2013); doi: 10.1117/12.2010646
Show Author Affiliations
Satoshi Takei, Toyama Prefectural Univ. (Japan)
Osaka Univ. (Japan)
Naoya Kubo, Toyama Prefectural Univ. (Japan)
Takumi Ichikawa, Toyama Prefectural Univ. (Japan)
Kazuki Maekawa, Toyama Prefectural Univ. (Japan)
Yoshiyuki Yokoyama, Toyama Industrial Technology Ctr. (Japan)

Published in SPIE Proceedings Vol. 8682:
Advances in Resist Materials and Processing Technology XXX
Mark H. Somervell, Editor(s)

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