Share Email Print

Proceedings Paper

Materials development of smart thin-film TiNi/PZT Heterostructures
Author(s): Peter G. Mercado; A. Peter Jardine
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Thin film layers of shape memory alloys and ferroelectric ceramics can produce a family of `smart' heterostructures capable of performing both sensing and actuating functions. Important issues in these synthesis of these active structures are the ability to generate the appropriate crystalline phases of each material, while producing defect-free homogeneous high quality films. The compatibility of sol-gel processed Pb(Zr,Ti)O3 (PZT) thin films with thin film shape memory effect TiNi substrates were investigated. Thin film TiNi was deposited on quartz substrates by physical sputter deposition utilizing a TiNi target in a ultra-high vacuum chamber, and followed by in-situ vacuum annealing. PZT was deposited on TiNi by sol-gel and spin coating processes. The ferroelectric tetragonal phase of PZT was obtained by a 600 degree(s)C anneal for 5 m in air. The heterostructures were nominally defect-free, unlike those obtained through deposition onto bulk TiNi substrates.

Paper Details

Date Published: 2 February 1995
PDF: 10 pages
Proc. SPIE 2427, Active Materials and Smart Structures, (2 February 1995); doi: 10.1117/12.200925
Show Author Affiliations
Peter G. Mercado, SUNY/Stony Brook (United States)
A. Peter Jardine, SUNY/Stony Brook (United States)

Published in SPIE Proceedings Vol. 2427:
Active Materials and Smart Structures
Gary L. Anderson; Dimitris C. Lagoudas, Editor(s)

© SPIE. Terms of Use
Back to Top