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Proceedings Paper

A new fabrication method for nano-gratings based on the high flexibility of PDMS
Author(s): Min Cui; Yong Zhang; Binzhen Zhang; Wanjun Wang
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Paper Abstract

The nano-gratings are widely used in the optical measurement, integrated optics, optical information processing and other fields. It has been prepared by using electron beam lithography, etching, electroplating, nano imprinting, and LIGA technologies. In general, the fabrications of nano-grating require expensive and sophisticated equipment. The fabrication procedures involved are often complicated, therefore resulting in high cost and long production cycles. We report a new technology to fabricate nano-grating with much lower-cost. The technology is based on utilizing the high flexibility of PDMS and the nano-molding technology. Using this technology, nano-gratings can be fabricated in low-cost and no expensive or high precision equipment is needed. Because of the excellent replication property of PDMS molds, large number of gratings can be made with a single master mold.

Paper Details

Date Published: 13 March 2013
PDF: 5 pages
Proc. SPIE 8616, MOEMS and Miniaturized Systems XII, 86160Y (13 March 2013); doi: 10.1117/12.2008389
Show Author Affiliations
Min Cui, North Univ. of China (China)
Yong Zhang, North Univ. of China (China)
Binzhen Zhang, North Univ. of China (China)
Wanjun Wang, North Univ. of China (China)

Published in SPIE Proceedings Vol. 8616:
MOEMS and Miniaturized Systems XII
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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