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Proceedings Paper

Selective localised modifications of silicon crystal by ultrafast laser induced micro-explosion
Author(s): Ludovic Rapp; Bianca Haberl; Jodie E. Bradby; Eugene G. Gamaly; Jim S. Williams; Saulius Juodkasis; Andrei V. Rode
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Paper Abstract

Femtosecond (fs) laser pulses focused and confined inside the bulk of a material can deposit a volume energy density up to several MJ/cm3 in a sub-micron volume. This creates highly non-equilibrium, hot, dense and short-lived plasmas with conditions favorable for arrangement of atoms into unusual material phases. Singlecrystal silicon was exposed to strong shock waves induced by laser micro-explosion in confined geometry. The conditions of confinement were realized by focusing 170-fs pulses, with the energy up to 2.5 μJ, on a Si surface buried under a 10-μm thick SiO2-layer formed by oxidation of a Si-wafer. The generated intensity was 1015 W/cm2, well above the threshold for optical breakdown and plasma formation. The shock wave modified areas of the Si crystal were sectioned using a focused-ion beam and characterized with scanning electron microscopy. A void surrounded by a shock-wave-modified Si was observed at the Si/SiO2 boundary. The results demonstrate that confined micro-explosion opens up new perspectives for studies of high-pressure materials at the laboratory table-top expanding the laser-induced micro-explosion capabilities into the domain of non-transparent materials.

Paper Details

Date Published: 29 March 2013
PDF: 6 pages
Proc. SPIE 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII, 86070H (29 March 2013); doi: 10.1117/12.2007550
Show Author Affiliations
Ludovic Rapp, The Australian National Univ. (Australia)
Bianca Haberl, The Australian National Univ. (Australia)
Jodie E. Bradby, The Australian National Univ. (Australia)
Eugene G. Gamaly, The Australian National Univ. (Australia)
Jim S. Williams, The Australian National Univ. (Australia)
Saulius Juodkasis, Swinburne Univ. of Technology (Australia)
Andrei V. Rode, The Australian National Univ. (Australia)

Published in SPIE Proceedings Vol. 8607:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII
Xianfan Xu; Guido Hennig; Yoshiki Nakata; Stephan W. Roth, Editor(s)

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