
Proceedings Paper
Optical phased array using single crystalline silicon high-contrast-gratings for beamsteeringFormat | Member Price | Non-Member Price |
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Paper Abstract
We present a single crystalline silicon optical phased array using high-contrast-gratings (HCG) for fast two dimensional
beamforming and beamsteering at 0.5 MHz. Since there are various applications for beamforming and beamsteering
such as 3D imaging, optical communications, and light detection and ranging (LIDAR), it is great interest to develop
ultrafast optical phased arrays. However, the beamsteering speed of optical phased arrays using liquid crystal and
electro-wetting are typically limited to tens of milliseconds. Optical phased arrays using micro-electro-mechanical
systems (MEMS) technologies can operate in the submegahertz range, but generally require metal coatings. The metal
coating unfortunately cause bending of mirrors due to thermally induced stress.
The novel MEMS-based optical phased array presented here consists of electrostatically driven 8 × 8 HCG pixels
fabricated on a silicon-on-insulator (SOI) wafer. The HCG mirror is designed to have 99.9% reflectivity at 1550 nm
wavelength without any reflective coating. The size of the HCG mirror is 20 × 20 μm2 and the mass is only 140 pg,
much lighter than traditional MEMS mirrors. Our 8 × 8 optical phased array has a total field of view of ±10° × 10° and a
beam width of 2°. The maximum phase shift regarding the actuation gap defined by a 2 μm buried oxide layer of a SOI
wafer is 1.7π at 20 V.
Paper Details
Date Published: 15 March 2013
PDF: 6 pages
Proc. SPIE 8633, High Contrast Metastructures II, 86330F (15 March 2013); doi: 10.1117/12.2007193
Published in SPIE Proceedings Vol. 8633:
High Contrast Metastructures II
Connie J. Chang-Hasnain; Fumio Koyama; Alan Eli Willner; Weimin Zhou, Editor(s)
PDF: 6 pages
Proc. SPIE 8633, High Contrast Metastructures II, 86330F (15 March 2013); doi: 10.1117/12.2007193
Show Author Affiliations
Byung-Wook Yoo, Univ. of California, Berkeley (United States)
Trevor Chan, Univ. of California, Davis (United States)
Mischa Megens, Univ. of California, Berkeley (United States)
Tianbo Sun, Univ. of California, Berkeley (United States)
Weijian Yang, Univ. of California, Berkeley (United States)
Trevor Chan, Univ. of California, Davis (United States)
Mischa Megens, Univ. of California, Berkeley (United States)
Tianbo Sun, Univ. of California, Berkeley (United States)
Weijian Yang, Univ. of California, Berkeley (United States)
Yi Rao, Univ. of California, Berkeley (United States)
David A. Horsley, Univ. of California, Davis (United States)
Connie J. Chang-Hasnain, Univ. of California, Berkeley (United States)
Ming C. Wu, Univ. of California, Berkeley (United States)
David A. Horsley, Univ. of California, Davis (United States)
Connie J. Chang-Hasnain, Univ. of California, Berkeley (United States)
Ming C. Wu, Univ. of California, Berkeley (United States)
Published in SPIE Proceedings Vol. 8633:
High Contrast Metastructures II
Connie J. Chang-Hasnain; Fumio Koyama; Alan Eli Willner; Weimin Zhou, Editor(s)
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