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Proceedings Paper

Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning
Author(s): U. Hofmann; M. Aikio; J. Janes; F. Senger; V. Stenchly; M. Weiss; H.-J. Quenzer; B. Wagner; W. Benecke
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Paper Abstract

Low-cost automotive laser scanners for environment perception are needed to enable the integration of advanced driver assistant systems (ADAS) into all automotive vehicle segments, a key to reducing the number of traffic accidents on roads. An omnidirectional 360 degree laser scanning concept has been developed based on combination of an omnidirectional lens and a biaxial large aperture MEMS mirror. This omnidirectional scanning concept is the core of a small sized low-cost time-of-flight based range sensor development. This paper describes concept, design, fabrication and first measurement results of a resonant biaxial 7mm gimbal-less MEMS mirror that is electrostatically actuated by stacked vertical comb drives. Identical frequencies of the two resonant axes are necessary to enable the required circle scanning capability. A tripod suspension was chosen since it allows minimizing the frequency splitting of the two resonant axes. Low mirror curvature is achieved by a thickness of the mirror of more than 500 μm. Hermetic wafer level vacuum packaging of such large mirrors based on multiple wafer bonding has been developed to enable to achieve a large mechanical tilt angle of +/- 6.5 degrees in each axis. The 7mm-MEMS mirror demonstrates large angle circular scanning at 1.5kHz.

Paper Details

Date Published: 13 March 2013
PDF: 14 pages
Proc. SPIE 8616, MOEMS and Miniaturized Systems XII, 86160C (13 March 2013); doi: 10.1117/12.2006189
Show Author Affiliations
U. Hofmann, Fraunhofer-Institut für Siliziumtechnologie (Germany)
M. Aikio, VTT Technical Research Ctr. of Finland (Finland)
J. Janes, Fraunhofer-Institut für Siliziumtechnologie (Germany)
F. Senger, Fraunhofer-Institut für Siliziumtechnologie (Germany)
V. Stenchly, Fraunhofer-Institut für Siliziumtechnologie (Germany)
M. Weiss, Fraunhofer-Institut für Siliziumtechnologie (Germany)
H.-J. Quenzer, Fraunhofer-Institut für Siliziumtechnologie (Germany)
B. Wagner, Fraunhofer-Institut für Siliziumtechnologie (Germany)
W. Benecke, Fraunhofer-Institut für Siliziumtechnologie (Germany)

Published in SPIE Proceedings Vol. 8616:
MOEMS and Miniaturized Systems XII
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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