We introduce an ultra-sensitive integrated photonic sensor structure using silicon on insulator based triangular resonator, in which a surface plasmon resonance (SPR) gold film is applied on a total internal reflection mirror. We have analyzed and optimized the triangular resonator sensor structure with an extremely small SPR mirror sensing area. Due to the large phase shift in the SPR mirror, a significantly enhanced sensitivity of 800 nm/RIU (refractive index unit) and the maximum peak shift of half free spectral range have been obtained at the SPR angle of 22.65° with Au thickness of 35 nm for the change of the refractive index Δn = 1x10^-3.

Date Published: 13 March 2013
PDF: 8 pages
Proc. SPIE 8627, Integrated Optics: Devices, Materials, and Technologies XVII, 862719 (13 March 2013); doi: 10.1117/12.2004946

Published in SPIE Proceedings Vol. 8627:
Integrated Optics: Devices, Materials, and Technologies XVII
Jean Emmanuel Broquin; Gualtiero Nunzi Conti, Editor(s)