
Proceedings Paper
Integrated surface plasmon resonance resonator using silicon on insulatorFormat | Member Price | Non-Member Price |
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Paper Abstract
We introduce an ultra-sensitive integrated photonic sensor structure using silicon on insulator based triangular resonator, in which a surface plasmon resonance (SPR) gold film is applied on a total internal reflection mirror. We have analyzed and optimized the triangular resonator sensor structure with an extremely small SPR mirror sensing area. Due to the large phase shift in the SPR mirror, a significantly enhanced sensitivity of 800 nm/RIU (refractive index unit) and the maximum peak shift of half free spectral range have been obtained at the SPR angle of 22.65° with Au thickness of 35 nm for the change of the refractive index Δn = 1x10-3.
Paper Details
Date Published: 13 March 2013
PDF: 8 pages
Proc. SPIE 8627, Integrated Optics: Devices, Materials, and Technologies XVII, 862719 (13 March 2013); doi: 10.1117/12.2004946
Published in SPIE Proceedings Vol. 8627:
Integrated Optics: Devices, Materials, and Technologies XVII
Jean Emmanuel Broquin; Gualtiero Nunzi Conti, Editor(s)
PDF: 8 pages
Proc. SPIE 8627, Integrated Optics: Devices, Materials, and Technologies XVII, 862719 (13 March 2013); doi: 10.1117/12.2004946
Show Author Affiliations
Geum-Yoon Oh, Chung-Ang Univ. (Korea, Republic of)
Doo-Gun Kim, Korea Photonics Technology Institute (Korea, Republic of)
Seon Hoon Kim, Korea Photonics Technology Institute (Korea, Republic of)
Hyun Chul Ki, Korea Photonics Technology Institute (Korea, Republic of)
Tae Un Kim, Korea Photonics Technology Institute (Korea, Republic of)
Doo-Gun Kim, Korea Photonics Technology Institute (Korea, Republic of)
Seon Hoon Kim, Korea Photonics Technology Institute (Korea, Republic of)
Hyun Chul Ki, Korea Photonics Technology Institute (Korea, Republic of)
Tae Un Kim, Korea Photonics Technology Institute (Korea, Republic of)
Hong-Seung Kim, Chung-Ang Univ. (Korea, Republic of)
Tae-Kyeong Lee, Chung-Ang Univ. (Korea, Republic of)
Byeong-Hyeon Lee, Chung-Ang Univ. (Korea, Republic of)
Young-Wan Choi, Chung-Ang Univ. (Korea, Republic of)
Tae-Kyeong Lee, Chung-Ang Univ. (Korea, Republic of)
Byeong-Hyeon Lee, Chung-Ang Univ. (Korea, Republic of)
Young-Wan Choi, Chung-Ang Univ. (Korea, Republic of)
Published in SPIE Proceedings Vol. 8627:
Integrated Optics: Devices, Materials, and Technologies XVII
Jean Emmanuel Broquin; Gualtiero Nunzi Conti, Editor(s)
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