
Proceedings Paper
Subwavelength grating couplers for efficient light coupling into silicon nanomembrane based photonic devicesFormat | Member Price | Non-Member Price |
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Paper Abstract
We demonstrate efficient coupling of light into silicon nanomembrane (SiNM) based photonic devices using a
subwavelength grating (SWG) coupler. Our designed 17.1 μm x 10 μm grating couplers are fabricated at the input
and the output of 8 mm x 2.5 μm SiNM waveguides on a glass substrate. A high coupling efficiency of 39.2% is
achieved at a wavelength of 1555.56 nm. The 1-dB and 3-dB bandwidths are measured to be 29 nm and 57 nm,
respectively. Peak efficiency variation of 0.26 dB is observed from a measurement of 5 grating pairs. Such grating
couplers open limitless possibilities for the development of high performance nanomembrane based photonic
devices.
Paper Details
Date Published: 27 February 2013
PDF: 6 pages
Proc. SPIE 8630, Optoelectronic Interconnects XIII, 86301C (27 February 2013); doi: 10.1117/12.2004707
Published in SPIE Proceedings Vol. 8630:
Optoelectronic Interconnects XIII
Alexei L. Glebov; Ray T. Chen, Editor(s)
PDF: 6 pages
Proc. SPIE 8630, Optoelectronic Interconnects XIII, 86301C (27 February 2013); doi: 10.1117/12.2004707
Show Author Affiliations
Harish Subbaraman, Omega Optics, Inc. (United States)
Xiaochuan Xu, The Univ. of Texas at Austin (United States)
Xiaochuan Xu, The Univ. of Texas at Austin (United States)
John Covey, The Univ. of Texas at Austin (United States)
Ray T. Chen, The Univ. of Texas at Austin (United States)
Ray T. Chen, The Univ. of Texas at Austin (United States)
Published in SPIE Proceedings Vol. 8630:
Optoelectronic Interconnects XIII
Alexei L. Glebov; Ray T. Chen, Editor(s)
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