Proceedings Paper
Fiber profilometer for measurement of hard-to-access areas| Format | Member Price | Non-Member Price |
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Paper Abstract
A fiber profilometer is developed to measure hard-to-access areas. This system utilizes low coherence light interferometry technique to detect profiles of internal surfaces of samples. A differentiation method is employed to enhance vertical resolutions of imaging results. An auto-focusing scheme is proposed to obtain an optimized lateral resolution. The performance of the profilometer system is demonstrated by experimental studies.
Paper Details
Date Published: 22 February 2013
PDF: 6 pages
Proc. SPIE 8603, High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications II, 86030Z (22 February 2013); doi: 10.1117/12.2003784
Published in SPIE Proceedings Vol. 8603:
High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications II
Friedhelm Dorsch, Editor(s)
PDF: 6 pages
Proc. SPIE 8603, High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications II, 86030Z (22 February 2013); doi: 10.1117/12.2003784
Show Author Affiliations
Zhuang Liu, A*STAR Singapore Institute of Manufacturing Technology (Singapore)
Nanyang Technological Univ. (Singapore)
Xia Yu, A*STAR Singapore Institute of Manufacturing Technology (Singapore)
Qi Jie Wang, Nanyang Technological Univ. (Singapore)
Nanyang Technological Univ. (Singapore)
Xia Yu, A*STAR Singapore Institute of Manufacturing Technology (Singapore)
Qi Jie Wang, Nanyang Technological Univ. (Singapore)
Shaw Wei Kok, A*STAR Singapore Institute of Manufacturing Technology (Singapore)
Ying Zhang, A*STAR Singapore Institute of Manufacturing Technology (Singapore)
Ying Zhang, A*STAR Singapore Institute of Manufacturing Technology (Singapore)
Published in SPIE Proceedings Vol. 8603:
High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications II
Friedhelm Dorsch, Editor(s)
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