We present an integrated beam scanning system without moving mechanical parts. The device based on the thermooptical effect. In combination with a silicon oxynitrid waveguide and a planar integrated lens we use thin film heaters for thermooptical deflection of a guided mode close to the edge of an integrated optical chip. This leads to a deflection at the collimation optic consisting of a planar lens. We show thermal simulation for the optimization of the heater position. The result of the thermal simulation is combined with BPM simulation to evaluate the change of the mode position during heating. First deflection measurements of the system are shown.

Date Published: 13 March 2013
PDF: 8 pages
Proc. SPIE 8616, MOEMS and Miniaturized Systems XII, 86160A (13 March 2013); doi: 10.1117/12.2003625

Published in SPIE Proceedings Vol. 8616:
MOEMS and Miniaturized Systems XII
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)