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Proceedings Paper

Fabrication and characterization of nitride-based blue light-emitting diodes on moth-eye patterned sapphire substrate (MPSS)
Author(s): T. Tsuchiya; S. Umeda; Mihoko Sowa; T. Kondo; T. Kitano; M. Mori; A. Suzuki; K. Naniwae; H. Sekine; M. Iwaya; T. Takeuchi; S. Kamiyama; I. Akasaki
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Paper Abstract

The fabrication procedure of a moth-eye patterned sapphire substrate (MPSS), which can enhance the light extraction efficiency of nitride-based light emitting diodes (LEDs) has been examined. The optimization of surface morphology after the etching of the MPSS for high-quality GaN growth was also performed. Then, we fabricated MPSS samples with a fixed pitch of 460nm, and corn height ranging from 50 to 350nm. The light extraction efficiency of blue-LEDs grown on a series of MPSS was enhanced about 1.4 times compared with the devices grown on a flat sapphire substrate. We found that if corn height exceeds 150nm, the MPSS effect is sufficiently observed.

Paper Details

Date Published: 4 March 2013
PDF: 7 pages
Proc. SPIE 8641, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XVII, 86410J (4 March 2013); doi: 10.1117/12.2003527
Show Author Affiliations
T. Tsuchiya, Meijo Univ. (Japan)
S. Umeda, Meijo Univ. (Japan)
Mihoko Sowa, Meijo Univ. (Japan)
T. Kondo, EL-SEED Corp. (Japan)
T. Kitano, EL-SEED Corp. (Japan)
M. Mori, EL-SEED Corp. (Japan)
A. Suzuki, EL-SEED Corp. (Japan)
K. Naniwae, EL-SEED Corp. (Japan)
H. Sekine, DIC Corp. (Japan)
M. Iwaya, Meijo Univ. (Japan)
T. Takeuchi, Meijo Univ. (Japan)
S. Kamiyama, Meijo Univ. (Japan)
I. Akasaki, Meijo Univ. (Japan)
Nagoya Univ. (Japan)

Published in SPIE Proceedings Vol. 8641:
Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XVII
Klaus P. Streubel; Heonsu Jeon; Li-Wei Tu; Martin Strassburg, Editor(s)

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