
Proceedings Paper
Three dimensional (3D) parallel processing holographic lithography using femtosecond laser pulseFormat | Member Price | Non-Member Price |
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Paper Abstract
Holographic three dimensional (3D) parallel lithography using femtosecond laser pulse were demonstrated in this paper.
A computer generated hologram (CGH) that calculated using kinoform algorithm with optimal rotation angle (ORA)
method were used in order to increase the uniformity of the diffraction peaks so that the resolution of the 3D image also
improved. The use of femtosecond pulse duration of a Ti:sapphire laser improved the holograms resolution due to larger
peak powers that generate larger photonics concentrations at the beam focus and improve single-shot processing. A
digital instrument nanoscope was used to verify the result and scanning electron microscopy (SEM) will be used to
observe the detail result.
Paper Details
Date Published: 1 March 2013
PDF: 6 pages
Proc. SPIE 8644, Practical Holography XXVII: Materials and Applications, 864404 (1 March 2013); doi: 10.1117/12.2003503
Published in SPIE Proceedings Vol. 8644:
Practical Holography XXVII: Materials and Applications
Hans I. Bjelkhagen; V. Michael Bove Jr., Editor(s)
PDF: 6 pages
Proc. SPIE 8644, Practical Holography XXVII: Materials and Applications, 864404 (1 March 2013); doi: 10.1117/12.2003503
Show Author Affiliations
Anas Fauzi, Chungbuk National Univ. (Korea, Republic of)
Sung-Jin Kim, Chungbuk National Univ. (Korea, Republic of)
Jong-Rae Jung, Suwon Science College (Korea, Republic of)
Sung-Jin Kim, Chungbuk National Univ. (Korea, Republic of)
Jong-Rae Jung, Suwon Science College (Korea, Republic of)
Seok-Hee Jeon, Univ. of Incheon (Korea, Republic of)
Nam Kim, Chungbuk National Univ. (Korea, Republic of)
Nam Kim, Chungbuk National Univ. (Korea, Republic of)
Published in SPIE Proceedings Vol. 8644:
Practical Holography XXVII: Materials and Applications
Hans I. Bjelkhagen; V. Michael Bove Jr., Editor(s)
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