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Proceedings Paper

Double-pulse irradiation of ultrafast laser for high-efficiency glass microwelding
Author(s): Koji Sugioka; Sizhu Wu; Katsumi Midorikawa
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Paper Abstract

Efficient microwelding of glass substrates by irradiation using a double-pulse train of ultrafast laser pulses is demonstrated. The bonding strength of two photosensitive glass substrates welded by double-pulse irradiation was evaluated to be 13.36 MPa, which is approximately 27% greater than that of a sample prepared by conventional irradiation by a single-pulse train. Such an improvement is responsible for individual control of each electron excitation process, i.e., multiphoton ionization or tunneling ionization by the 1st pulse followed by electron heating or avalanche ionization by 2nd pulse. This paper performs characterization of samples prepared by the double-pulse irradiation and then discusses the detailed mechanism for efficient welding.

Paper Details

Date Published: 13 March 2013
PDF: 11 pages
Proc. SPIE 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII, 86070G (13 March 2013); doi: 10.1117/12.2003469
Show Author Affiliations
Koji Sugioka, RIKEN (Japan)
Sizhu Wu, RIKEN (Japan)
Katsumi Midorikawa, RIKEN (Japan)

Published in SPIE Proceedings Vol. 8607:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII
Xianfan Xu; Guido Hennig; Yoshiki Nakata; Stephan W. Roth, Editor(s)

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