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Proceedings Paper

Figure of merit for comparison of misalignment test structures
Author(s): Nikhil N. Kundu; Khalil I. Arshak; Bill Lane; J. Geaney; Shri N. Gupta
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Paper Abstract

Many designs of misalignment test structures have been developed to evaluate registration error. It is desirable to compare the capabilities of these structures. However, a quantitative measure of comparison for such structures is not available. An attempt has been made in this paper to evaluate a quantitative comparison criterion. Technical merit of a test structure can be determined from the accuracy and precision of the measurement data. A Figure of Merit(FOM) is described here, for comparing the capabilities of two or more such test structures quantitatively.

Paper Details

Date Published: 1 June 1990
PDF: 7 pages
Proc. SPIE 1261, Integrated Circuit Metrology, Inspection, and Process Control IV, (1 June 1990); doi: 10.1117/12.20031
Show Author Affiliations
Nikhil N. Kundu, Univ. of Limerick (United Kingdom)
Khalil I. Arshak, Univ. of Limerick (Ireland)
Bill Lane, Analog Devices B.V. (Ireland)
J. Geaney, Analog Devices B.V. (Ireland)
Shri N. Gupta, DEC (Ireland) (Ireland)

Published in SPIE Proceedings Vol. 1261:
Integrated Circuit Metrology, Inspection, and Process Control IV
William H. Arnold, Editor(s)

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