In this work, we present the holographic fabrication of woodpile-type photonic crystal templates in photosensitive polymer using a silicon-on-PDMS based reflective optical element. The reflective optical element is fabricated from four silicon chips placed inside a polydimethylsiloxane (PDMS) mold, which reflects a circularly or elliptically polarized beam into four linearly polarized side beams, arranged four-fold symmetrically about a central beam, with electric fields normal to the incident plane, and also reduces the laser intensity of the side beams. With a single beam and a single reflective optical element, we can generate the desired laser beam intensities and polarization of each beam, thereby creating woodpile-type photonic crystal templates, and improving the contrast of 3D structures.

Date Published: 5 March 2013
PDF: 7 pages
Proc. SPIE 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI, 86131C (5 March 2013); doi: 10.1117/12.2002882

Published in SPIE Proceedings Vol. 8613:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI
Georg von Freymann; Winston V. Schoenfeld; Raymond C. Rumpf, Editor(s)