Proceedings Paper
Spectroscopic ellipsometry study of novel nanostructured transparent conducting oxide structures| Format | Member Price | Non-Member Price |
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Paper Abstract
Spectroscopic ellipsometry has been used to find the optical constants, including refractive index, extinction
coefficient, thickness and volume fraction of nanostructured transparent conducting oxides including indium tin oxide
(ITO) and indium zinc oxide (IZO). We observed sharp features in the ellipsometry data, with the spectral peaks and
positions depending on the nanostructure dimensions and material. A superposition of Lorentzian oscillators and the
effective medium approximation has been applied to determine the volume ratio of voids and nanopillars, thereby
providing the effective optical constants.
Paper Details
Date Published: 21 February 2013
PDF: 7 pages
Proc. SPIE 8632, Photonic and Phononic Properties of Engineered Nanostructures III, 86320I (21 February 2013); doi: 10.1117/12.2002827
Published in SPIE Proceedings Vol. 8632:
Photonic and Phononic Properties of Engineered Nanostructures III
Ali Adibi; Shawn-Yu Lin; Axel Scherer, Editor(s)
PDF: 7 pages
Proc. SPIE 8632, Photonic and Phononic Properties of Engineered Nanostructures III, 86320I (21 February 2013); doi: 10.1117/12.2002827
Show Author Affiliations
Akram A. Khosroabadi, College of Optical Sciences, The Univ. of Arizona (United States)
R. A. Norwood, College of Optical Sciences, The Univ. of Arizona (United States)
Published in SPIE Proceedings Vol. 8632:
Photonic and Phononic Properties of Engineered Nanostructures III
Ali Adibi; Shawn-Yu Lin; Axel Scherer, Editor(s)
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