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Proceedings Paper

Silicon-based monolithically integrated whispering-gallery mode resonators
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Paper Abstract

We report on the realization and characterization of a silicon-based integrated optical platform which implements a vertical coupling scheme between a Whispering-gallery type microresonator and a buried dielectric waveguide. The vertical coupling allows for the separation of the resonator and the waveguide into different planes, which enables the realization of the optical components in different materials/thicknesses. The high optical quality of this micro-optical system follows from the accurate planarization of the waveguide topography, which is achieved by multiple depositions-and-reflows of a borophosphosilicate glass over strip waveguides. Importantly, we demonstrate the feasibility of our approach for wafer-scale mass fabrication of freestanding planar resonators suspended in air and coupled to integrated bus waveguides. This opens the door for the realization of stable all-integrated resonator systems and it has the potential to substitute todays complicated fiber-taper coupling schemes.

Paper Details

Date Published: 22 February 2013
PDF: 9 pages
Proc. SPIE 8600, Laser Resonators, Microresonators, and Beam Control XV, 86001G (22 February 2013); doi: 10.1117/12.2002387
Show Author Affiliations
Fernando Ramiro-Manzano, Univ. degli Studi di Trento (Italy)
Mher Ghulinyan, Fondazione Bruno Kessler (Italy)
Nikola Prtljaga, Univ. degli Studi di Trento (Italy)
Georg Pucker, Fondazione Bruno Kessler (Italy)
Lorenzo Pavesi, Univ. degli Studi di Trento (Italy)

Published in SPIE Proceedings Vol. 8600:
Laser Resonators, Microresonators, and Beam Control XV
Alexis V. Kudryashov; Alan H. Paxton; Vladimir S. Ilchenko; Lutz Aschke; Kunihiko Washio, Editor(s)

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