This paper describes an effective method for the measurements of large aperture sampling grating, the sampling efficiency the sampling focal length and the sampling angle. By using a 351nm collimation laser source to scan the full aperture of the sampling grating in every subregion, the diffraction power of “0” order and “+1” order can be obtained synchronously by two standard integrating balls, And then by calculating the sampling efficiency of this subregion and splicing the acquisition data, we can get the averaged grating sampling efficiency in the full aperture.Based on this method, we can effectively eliminate the effect of the output instability of laser source, decrease the uncertainty of test results. According to the fabrication principle of the sampling grating, measurements for the sampling focal length and the sampling angle can be performed. Test rersults indicate that this method can be used to measure large aperture sampling gratings

Date Published: 15 October 2012
PDF: 5 pages
Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84170W (15 October 2012); doi: 10.1117/12.2002127

Published in SPIE Proceedings Vol. 8417:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Libin Xiang; Sandy To, Editor(s)