This paper presents design, fabrication and measurements for single-axis piezoelectric MEMS micromirrors with 1 mm² apertures. These micromirrors, which feature thin-film PZT actuators and mechanical leverage amplification, are dedicated for laser projection and meet the requirements of high resonant frequency and large deflection angles. To identify the optimal micromirror geometries a parametric study by means of FEM simulations and analytic modeling has been performed. Characterization, related to the material qualities of PZT and the mechanical performance of the micromirrors, have verified the reliability of the process, the robustness and the performance of the fabricated prototypes. According to the measurements the fabricated micromirrors feature high Q-factor about 1570. The micromirror reaches the θ_opt·D product of 42.5 °·mm at 32 kHz driven by a low voltage of 7 V. Furthermore, new designs with larger apertures and deflections are currently being developed.

Date Published: 9 March 2013
PDF: 8 pages
Proc. SPIE 8612, Micromachining and Microfabrication Process Technology XVIII, 86120I (9 March 2013); doi: 10.1117/12.2001620

Published in SPIE Proceedings Vol. 8612:
Micromachining and Microfabrication Process Technology XVIII
Mary Ann Maher; Paul J. Resnick, Editor(s)