Vertical-Cavity Surface-Emitting Lasers (VCSELs) are very attractive to high power light sources owing to the advantageous configuration of two-dimensional arrays and being free from catastrophic optical damage. Although oxideconfined VCSELs have been employed in most of applications with VCSELs, ion-implanted VCSELs have a potential to be the better light sources for high power applications. In spite of the fact, the detailed characteristics of the ionimplanted VCSELs had been researched only in ten milliwatt-class output power. Here we report on a high power VCSEL-array with proton-implanted current apertures. A peak output power of over 40 W under short-pulse operation has been achieved. This is the first demonstration of ten watt-class output power for ion-implanted VCSELs.

Date Published: 13 March 2013
PDF: 8 pages
Proc. SPIE 8639, Vertical-Cavity Surface-Emitting Lasers XVII, 86390N (13 March 2013); doi: 10.1117/12.2001589

Published in SPIE Proceedings Vol. 8639:
Vertical-Cavity Surface-Emitting Lasers XVII
Kent D. Choquette; James K. Guenter, Editor(s)