Share Email Print

Proceedings Paper

Lateral diffusion epitaxy (LDE) of single crystal silicon with downward facing substrate
Author(s): Luke H. L. Yu; Bo Li; Huaxiang Shen; Adrian H. Kitai
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

An increase in the aspect ratio of silicon platelets grown by Lateral Diffusion Epitaxy (LDE) is achieved. Epitaxial growth is achieved by a compound graphite slider boat in which an oxidized silicon plate is placed above the seed line on the substrate. The function of the plate is to i) favor side wall growth by limiting vertical nucleation on the platelets, and ii) to enhance the surface smoothness by restricting diffusion of silicon to a horizontal direction. We have studied layer growth from the In-Si liquid phase by reducing the gap between substrate and plate. By reducing the gap, it allows for a more uniform growth of silicon from the side wall of the strip. In addition, we investigate repositioning the silicon seed line to a downward orientation. In this case, the diffusion rate increases due to a gravity effect.

Paper Details

Date Published: 24 October 2012
PDF: 7 pages
Proc. SPIE 8412, Photonics North 2012, 84121N (24 October 2012); doi: 10.1117/12.2001437
Show Author Affiliations
Luke H. L. Yu, McMaster Univ. (Canada)
Bo Li, McMaster Univ. (Canada)
Huaxiang Shen, McMaster Univ. (Canada)
Adrian H. Kitai, McMaster Univ. (Canada)

Published in SPIE Proceedings Vol. 8412:
Photonics North 2012
Jean-Claude Kieffer, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?